| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48d97c57a872ec890579bbb128d23563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2eed1124906ae0fbac3c34b39901f362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fffdda22630f85e89854f6c18a19eeeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ce404785cbfefc05bec5fc3a51b7072 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09e5edeeb2318473f909941846bacdef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b54ea2b45516ed0e7949aff75146321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55c422f6f6a7082fa34200f47adc32d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80d0627071d4f5df1043a7a62e9879a0 |
| publicationDate |
2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006246681-A1 |
| titleOfInvention |
Sacrificial benzocyclobutene/norbornene polymers for making air gap semiconductor devices |
| abstract |
A method of forming an air gap within a semiconductor structure by the steps of: (a) using a sacrificial polymer to occupy a space in a semiconductor structure; and (b) heating the semiconductor structure to decompose the sacrificial polymer leaving an air gap within the semiconductor structure, wherein the sacrificial polymer of step (a) is: (a) a copolymer of 5-ethylidene-2-norbornene and vinylbenzocyclobutene (or a vinylbenzocyclobutene derivative); or (b) a copolymer of 5-ethylidene-2-norbornene and 5-(3benzocyclobutylidene)-2-norbornene; or (c) a polymer of 5-(3benzocyclobutylidene)-2-norbornene. In addition, a semiconductor structure, having a sacrificial polymer positioned between conductor lines, wherein the sacrificial polymer is: (a) a copolymer of 5-ethylidene-2-norbornene and vinylbenzocyclobutene (or a vinylbenzocyclobutene derivative); or (b) a copolymer of 5-ethylidene-2-norbornene and 5-(3benzocyclobutylidene)-2-norbornene; or (c) a polymer of 5-(3benzocyclobutylidene)-2-norbornene. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008233343-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9243098-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8456009-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7651735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10361152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011198757-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014137609-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7999160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014163175-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560141-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999839-B2 |
| priorityDate |
2003-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |