http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006240186-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02 |
| filingDate | 2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e96599b47368b0d64e71ba01f8b89c69 |
| publicationDate | 2006-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2006240186-A1 |
| titleOfInvention | Coating film forming method |
| abstract | The object of the present invention is to provide a method for forming a coating film in which a coating film is prevented from drastically shrinking by controlling the temperature accurately when a SOG film is formed in a substrate with a coating liquid containing an alkoxysilane compound, cracks are prevented from occurring in the SOG film by preventing the glass forming material from disappearing, and also metal materials of the circuit are prevented from melting and deforming. According to the present invention, the temperature of the surface of the material to be treated is escalated from a lower temperature to a higher temperature by setting at least three ranges of the temperature in the drying process, and the temperature of the surface of the material to be treated is further increased to 250-500° C. and maintained within the range of ±3° C. during the baking process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10966327-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019029126-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2355141-A3 |
| priorityDate | 2005-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.