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| filingDate |
2003-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
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| publicationDate |
2006-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006233969-A1 |
| titleOfInvention |
Hybrid beam deposition system and methods for fabricating metal oxide-zno films, p-type zno films, and zno-based II-VI compound semiconductor devices |
| abstract |
A hybrid beam deposition (HBD) system and methods according to the present invention utilizes a unique combination of pulsed laser deposition (PLD) technique and equipment with equipment and techniques that provide a radical oxygen rf-plasma stream to effectively increase the flux density of available reactive oxygen at a deposition substrate for the effective synthesis of metal oxide thin films. The HBD system and methods of the present invention further integrate molecular beam epitaxy (MBE) and/or chemical vapor deposition (CVD) techniques and equipment in combination with the PLD equipment and technique and the radical oxygen rf-plasma stream to provide elemental source materials for the synthesis of undoped and/or doped metal oxide thin films as well as synthesis of undoped and/or doped metal-based oxide alloy thin films. |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7719020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008073643-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008226220-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008226219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007145499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010187555-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8334151-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023101726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009143226-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010014805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013071484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8467639-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10658557-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593854-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7973379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11374054-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010154558-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7529460-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7829376-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7606448-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013172791-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010085754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10454010-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10644213-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772829-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010032008-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007001186-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011062440-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005285119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I463689-B |
| priorityDate |
2002-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |