Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2323-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14623 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133734 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10 |
filingDate |
2006-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3be4ff07a7ad6bc6759d66499d736c8c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ffa89cf945833e3fffa6c67cddcb918 |
publicationDate |
2006-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2006231839-A1 |
titleOfInvention |
Method of treating inorganic oxide film, electronic device substrate, method of manufacturing electronic device substrate, liquid crystal panel, and electronic apparatus |
abstract |
A method of treating an inorganic oxide film includes: dipping an inorganic oxide film having a plurality of pores therein which is formed by an oblique deposition method into a treatment liquid containing alcohol; reducing pressure of a space where the treatment liquid is provided to infiltrate the treatment liquid into the pores of the inorganic oxide film; and chemically bonding the alcohol to a surface of the inorganic oxide film and inner surfaces of the pores. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9989808-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016161804-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9454041-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015098051-A1 |
priorityDate |
2005-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |