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publicationDate 2006-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006196377-A1
titleOfInvention Imprint lithography
abstract An imprinting method is disclosed that involves, in an embodiment, redistributing a volume of imprintable medium in a flowable state over a target portion of a surface of a substrate into regions of differing volume corresponding to regions of differing pattern density of an imprint pattern of a template, contacting the medium while in the flowable state with the template to form the imprint pattern in the medium, subjecting the medium to conditions to change the medium into a substantially non-flowable state, and separating the template from the medium while in the substantially non-flowable state.
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