Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c579e4e16d40e55dce0e338546825a91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0601e1adcb7860d9fa7846d1b6350a04 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-1258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
filingDate |
2006-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85b3687fa2ab5ba5c35e55864566d802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76158faf9ff4abe7043fc0694a57010b |
publicationDate |
2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2006178013-A1 |
titleOfInvention |
Method of forming film pattern, device, method of manufacturing device, electro-optical device, and electronic apparatus |
abstract |
A method of forming a film pattern by disposing functional liquid on a substrate includes: forming banks on the substrate; disposing the functional liquid in regions partitioned by the banks; and drying the functional liquid disposed on the substrate. A material for forming the banks contains one of polysilazane, polysilane, and polysiloxane. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9419245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008174627-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010264408-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015060822-A1 |
priorityDate |
2005-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |