http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006174942-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20dd77ec7361fe5799dcd86ed6bb8860 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-4259 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3127 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04F1-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D7-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04F1-06 |
| filingDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fa117f60f28fc0d051832f6d3e82ba2 |
| publicationDate | 2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2006174942-A1 |
| titleOfInvention | High purity chemical delivery system |
| abstract | A high purity chemical delivery system is provided that connects a high purity chemical container to a high purity chemical utilization point and that comprises three manifolds, each of the manifolds having a plurality of diaphragm valves. The inventive system enables rapid clean out and purge after the container is replaced by means of a plurality of vacuum and purge cycles, which remove residual chemical and entrapped impurities while reduced manufacturing downtimes compared with systems in the prior art. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104154418-A |
| priorityDate | 2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.