| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763 |
| filingDate |
2005-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00ec00da5b61486ec3fa04471e262a3f |
| publicationDate |
2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006141766-A1 |
| titleOfInvention |
Method of manufacturing semiconductor device |
| abstract |
A method of manufacturing a semiconductor device in which an etching process for forming a M1 trench for a bit line is stopped on a nitride etch-stop film and the bit line is formed on the nitride film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8491804-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633589-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010009542-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9111902-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8329050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9685369-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008025009-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010323478-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010216314-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010311245-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8202766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010048026-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7964508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8202805-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010240217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008311749-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8105949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642483-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557706-B2 |
| priorityDate |
2004-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |