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publicationDate 2006-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006141222-A1
titleOfInvention Introducing nanotubes in trenches and structures formed thereby
abstract Methods of forming a microelectronic structure are described. Embodiments of those methods include providing a substrate comprising at least one opening, and then applying a nanotube slurry comprising at least one nanotube to the substrate, wherein the at least one nanotube is substantially placed within the at least one opening.
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Total number of triples: 75.