http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006134332-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_85738507ffd219d3e29dbbb4c535039b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00 |
| filingDate | 2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e11f52f211a598670a24a3a0ce4ad089 |
| publicationDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2006134332-A1 |
| titleOfInvention | Precompressed coating of internal members in a supercritical fluid processing system |
| abstract | A processing system utilizing a supercritical fluid for treating a substrate is described as having internal members having a coating and coated internal members for such a system, with the coating prestressed to reduce the problem of generating coating stresses during processing. For example, the coating in internal members can reduce particulate contamination during processing. Additionally, a method for applying the coating to the internal member of the processing system is described, whereby stresses within the coating are relieved in the coating when the part is used in high pressure processing. The method is particularly useful for preventing or reducing high tensile stresses in coatings during high pressure processing. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8096064-B2 |
| priorityDate | 2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.