| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C99-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_749e9551a91b1a83600306e9addda240 |
| publicationDate |
2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006131269-A1 |
| titleOfInvention |
Object-moving method, object-moving apparatus and production process using the method |
| abstract |
A method of moving an object comprises a step of fixing the object to an object-moving means, a step of moving the object to a prescribed position by the object-moving means, and a step of releasing the object from the object-moving means; wherein the fixing step comprises forming a deposit, for fixation of the object to the object-moving means by applying a first corpuscular beam in a first gas to form a deposit; and the releasing step comprises etching the deposit by applying a second corpuscular beam in contact with a second gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1879011-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1879011-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10605824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012241607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312095-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011238225-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9355813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104792583-A |
| priorityDate |
2003-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |