http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006130913-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aaced19f5b27ee212a0d438fc1f0e25c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-86847 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87812 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K51-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-0631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-0624 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K11-044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K11-072 |
| filingDate | 2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b97e9bfbaa4af844215320d3e2ae6b9 |
| publicationDate | 2006-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2006130913-A1 |
| titleOfInvention | Non-contact shuttle valve for flow diversion in high pressure systems |
| abstract | A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean wafers. A clean flow diverting valve is provided having no grease or other contaminants, and having no rubbing seal surfaces, but rather incorporates a magnetically coupled valve actuator to move a ball or other valve seat for diverting flow between a common port and alternative switched ports in a non-rubbing, non-contact maimer. The valve is useful in semiconductor wafer high pressure processing tools for redirecting flow from a common inlet to alternative outlets or for admitting flow from alternative inlets to a common outlet. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109296823-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019137582-A1 |
| priorityDate | 2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 78.