| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6eb7abb484920bf8d61e47d84efbd17e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc5486764d495765c42855e386e651ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14c5090c4c255bf3d5184edb8238273b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c32ab9c335f6bee6f56b0c7cdc2d0527 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2005-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_264a886394a9de68924cf1d33337ad7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2c495d9d65d4ac086107d9fce9d7fd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db7a1cb5e16f4c36a22fb8da904481e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f236c1fd789f7ce627d2cfe815dc6cd8 |
| publicationDate |
2006-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006128146-A1 |
| titleOfInvention |
Method of forming barrier layer and method of fabricating interconnect |
| abstract |
A method of fabricating a barrier layer is described. A material layer having an opening formed therein is provided. Then, the material layer is disposed inside a physical vapor deposition chamber and a first deposition process is performed to form a first barrier layer on the surface of the opening. The first deposition process includes turning on a plasma source and turning off the plasma source. The turning on of the plasma source and the turning off of the plasma source are separated from each other by an interval less than 2 seconds. Thereafter, the first deposition process is repeated several times to form a second barrier layer comprising a plurality of first barrier layers. |
| priorityDate |
2004-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |