| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09909 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-1258
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 |
| filingDate |
2005-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_599631ad2f14dcd02f2772d66063f1fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5d6433f35e4dfaeb1fb6ed1f85754ba |
| publicationDate |
2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006084206-A1 |
| titleOfInvention |
Thin-film pattern forming method, semiconductor device, electro-optic device, and electronic apparatus |
| abstract |
A thin-film pattern forming method that deposits a plurality of thin films on a substrate to form a thin-film pattern, includes: forming a second thin film on the substrate, the second thin film having an affinity for a functional liquid containing a thin-film material that makes up a first thin film; providing lyophobic treatment that makes a surface of the second thin film repellent to the functional liquid; forming a concave portion that defines a pattern shape of the first thin film by removing part of the second thin film; discharging the functional liquid to the concave portion; and forming the first thin film by drying the functional liquid discharged to the concave portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016198571-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007020834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9452630-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521299-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008026499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765224-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9818802-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016351632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8413576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006035064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9826636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014290513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008055508-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013260536-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006154406-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010237534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8269216-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008132009-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008006161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062714-B2 |
| priorityDate |
2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |