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filingDate 2005-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006062698-A1
titleOfInvention MEMS actuator and method of manufacture for MEMS particle sorting device
abstract A micromechanical particle sorting chip uses an actuator divided into two parts to direct a component of interest into one of a plurality of possible exit paths, based on detection of a fluorescent signal emanating from the component of interest. The two-part actuator may include a force-generating portion and a microactuator portion. The microactuator portion may be disposable, whereas the force-generating portion may be reuseable. By bringing the force-generating portion into proximity to the microactuator portion, the microactuator is induced to move, thereby separating the component of interest from the rest of the fluid stream. The force-generating portion and the microactuator portion may be optimized and fabricated separately, thereby leading to faster, more reliable and less expensive particle sorting.
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