| abstract |
A semiconductor device including an SOI substrate and a MONOS type nonvolatile memory cell with a first drain composed of an n + type diffusion region and a second drain composed of a p + type diffusion region, wherein the first and second drains are arranged in different planar locations in a silicon layer of the SOI substrate. In the data write operation of the device, electrons are injected from the first drain, and then hot electrons created by a strong electric field between a control gate and a memory gate of the memory cell are injected into a charge storage layer. In the data erase operation of the device, holes are injected from the second drain, and then hot holes created by a strong electric field between the control gate and the memory gate are injected into the charge storage layer. The semiconductor device can reduce current consumption for erasing data. |