| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a752bdf448f5e53cc112f200930037 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2205-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F114-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F14-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F114-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-12 |
| filingDate |
2003-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5606626de179919af81c8cd6dd5e52a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd51fefa19cb59b9aae764be6e83dbaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99a61883735389b019620c057076bba2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2be30293a8963a99c445dd4e35925665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4891bd1b79e6fd6ab1f6a101db6af47 |
| publicationDate |
2006-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006041069-A1 |
| titleOfInvention |
Sealing material for semiconductor device and method for production thereof |
| abstract |
The present invention provides: a first sealing material for semiconductor device which sealing material is excellent in plasma resistance and inexpensive; and a second sealing material for semiconductor device and a method of manufacturing this sealing material wherein the sealing material has a good surface smoothness and a good dimensional precision. The first sealing material contains a fluororubber as a rubber component wherein the fluororubber inevitably contains a cured product of a fluorine-based elastic copolymer of a specific composition. The second sealing material is obtained by crosslinking, with ionizing radiation, a fluororubber preform containing a fluororubber component (a) (comprising a specific fluorine-based elastic copolymer) and a non-elastic fluororesin component (b) (comprising a vinylidene fluoride (co)polymer) in a specific ratio. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892197-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9416234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10090211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7942425-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9156985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010063810-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011184126-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012511074-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8263708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242210-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005253341-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009027213-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9869392-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9908980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014031461-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011237751-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011009568-A1 |
| priorityDate |
2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |