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publicationDate 2006-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2006037942-A1
titleOfInvention Slurry, chemical mechanical polishing method using the slurry, and method of forming a surface of a capacitor using the slurry
abstract A slurry, chemical mechanical polishing (CMP) method using the slurry, and method of forming a surface of a capacitor using the slurry. The slurry may include an abrasive, an oxidizer, and at least one pH controller to control a pH of the slurry.
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