| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02505 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02439 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00 |
| filingDate |
2005-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c53fd1b96b9aa91f2371854dfe7903c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c73b3d9cffc54b9efda942ea9c283b9 |
| publicationDate |
2006-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006008741-A1 |
| titleOfInvention |
Transparent amorphous carbon structure in semiconductor devices |
| abstract |
A transparent amorphous carbon layer is formed. The transparent amorphous carbon layer has a low absorption coefficient such that the amorphous carbon is transparent in visible light. The transparent amorphous carbon layer may be used in semiconductor devices for different purposes. The transparent amorphous carbon layer may be included in a final structure in semiconductor devices. The transparent amorphous carbon layer may also be used as a mask in an etching process during fabrication of semiconductor devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006003237-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7341957-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009140649-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7298024-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005056835-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007202657-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005056940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006244086-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8102117-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006022247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7129180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006001175-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7220683-B2 |
| priorityDate |
2003-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |