| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c47b251f6ed86274841699303350cdd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02bce07979d80026746708dcb3ec376d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4af4c04e65e777bcba1dffeed1b6c6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a226e787965b76f4df8a74f4a6ee634 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-855 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-24047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2003-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0c24782c8de6009d07f7e3c0cc95f39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c507684cc64636681b30af866a95865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_216f43a73c234215ffb921c60dc9839b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcfaf49eeae8dabc8c5acac65e19af30 |
| publicationDate |
2005-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005287820-A1 |
| titleOfInvention |
Mold for nano imprinting |
| abstract |
A metal mold for use in a nano-imprinting process comprises a firmly adhering monomolecular non-sticking layer. The later was obtained by subjecting the mold to a reaction with a fluoroalkyl compound having a mercapto group. As a result of said reaction, the layer comprises an organic sulfide of said metal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8927307-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101013261-B |
| priorityDate |
2002-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |