| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b39d49c637c6b9b61b5cbeda712dc1e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6609
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-861 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2004-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae7fc179ce71c20436edb05af2f39888 |
| publicationDate |
2005-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005287805-A1 |
| titleOfInvention |
Electronic device |
| abstract |
One embodiment of a method of making an electronic device includes forming on a substrate surface a first layer having a peak-valley-peak profile, and forming a second layer on the first layer by use of a target positioned along a line-of-sight that excludes a floor of the valley such that the second layer is not formed on the floor of said peak-valley-peak profile. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2289104-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2289104-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9520478-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8889538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9397187-B2 |
| priorityDate |
2004-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |