| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cfef24b7c3387b257310a379789e015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e46f6dffb02edee00f260e523e6c53b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61L2-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61L2-232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b15c496f5165aa69930b7e21d42d5049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3525f132dae7fa52fbb2de014a563c98 |
| publicationDate |
2005-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005287032-A1 |
| titleOfInvention |
Anti-bacterial protection to improve performance of post CMP clean brush |
| abstract |
A method including providing a residual bacteria-inhibiting property to a post-chemical mechanical polish (post-CMP) brush. A method including forming a post-chemical mechanical polish (post-CMP) brush; and residually modifying a bacteria-inhibiting property of a portion of an exterior surface of the formed brush. An apparatus including a post-chemical mechanical polish (post-CMP) brush including a residual bacteria inhibiting property. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008286319-A9
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8944886-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8926411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011002881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8808064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010330890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9221148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8801497-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006008490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8840447-B2 |
| priorityDate |
2004-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |