| abstract |
A micro-electromechanical integrated circuit includes a substrate. Drive circuitry is positioned on the substrate. A plurality of elongate actuators is fast at one end with the substrate. An opposite end of each elongate actuator is displaceable relative to the substrate on receipt of an electrical signal from the drive circuitry. The drive circuitry includes registers, gates and drive transistors such that each actuator covers the registers, gate and drive transistor for operation of that actuator and each drive transistor includes traces oriented substantially at right angles to its associated actuator. |