http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005272236-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-488 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-485 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate | 2004-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5160281589db62154dafe9b9e8ad617 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a633b7a52ef12c3a287a18f0abe14dcc |
| publicationDate | 2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005272236-A1 |
| titleOfInvention | Method for forming bit line contact hole/contact structure |
| abstract | Disclosed is a method for forming a bit line contact hole/contact structure. The method of the present invention comprises steps of providing a substrate; forming a pluarality of word line structures on the substrate; forming a doped dielectric layer on the substrate having the word line structures formed thereon; defining a position for forming a bit line contact hole; removing the doped dielectric layer other than the portion at the position for forming the bit line contact hole; forming a non-doped dielectric layer on the substrate having the word line structures and residual doped dielectric layer formed thereon; removing the residual doped dielectric layer by using an etchant with a high selectivity for doped dielectric layer/non-doped dielectric layer to form a bit line contact hole; and filling the bit line contact hole with conductive material for form a bit line contact structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014021529-A1 |
| priorityDate | 2004-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.