http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005272191-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be2daa84607761102f9a9a992ea821d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4055c19995db39ddbff9f1891e37a4da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffbbb93a7eca92083a43240df9ef9252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb4c0aff7081cc3890ba2d4251623f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d4d4e98af171f40b2a3519926be49db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c3e88153a6ef0da48cc5eed859fac22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d59dc404a0c2d83299eabb63ae10740
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823842
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
filingDate 2004-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b7f8481399e8ed48766f043aec3fd3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7349c7bb55c712535e5b43236f0c15b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_037b4b318d85baaf78b8893c4da4e2bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2131b593dbb331e0bd0dd8fde39d2673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07590adf098191acfd3879e80f617707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4502498c7ce135fb3ad7cdf03086430b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_000959a4ad5e3d17e65c80266baa6063
publicationDate 2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005272191-A1
titleOfInvention Replacement gate process for making a semiconductor device that includes a metal gate electrode
abstract A method for making a semiconductor device is described. That method comprises forming a sacrificial layer on a substrate, and forming a trench within the sacrificial layer. After forming a dummy gate electrode within the trench, a hard mask is formed on the dummy gate electrode and within the trench.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030163-B2
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priorityDate 2004-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475874-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003032303-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003045080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6291330-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002197790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410376-B1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004084734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6420279-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6255698-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454092735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454232550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452441329
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID292779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426031689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447945359
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559021
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161827978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23995
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4389803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520488
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452498775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4227894
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545753
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449693299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431511
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166601
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161922877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158731258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453621816
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452894838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26042
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61685

Total number of triples: 201.