http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005238818-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44af4f2a399dad4a6d228e9e9d2e0841 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2005-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb7f4b9b41926ceddf3b0305fd47ed0 |
| publicationDate | 2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005238818-A1 |
| titleOfInvention | Plasma processing method and plasma processing apparatus |
| abstract | A plasma processing method and a plasma processing apparatus. The plasma processing method includes: a placing process for placing the electrode material layer between a pair of electrodes formed in a vacuum chamber; a gas supply process for supplying a plasma processing gas into the vacuum chamber; and a electric field setting process for applying a main AC voltage superimposed on a reference voltage to one of the pair of electrodes via a capacitor and for keeping the other electrode at the reference potential. The placing process includes a process for locating the electrode material layer to be closer to the other electrode than to the one electrode. Moreover, the electric field setting process may include a process for applying an additional AC voltage having a lower frequency than a frequency of the main AC voltage between the other electrode and the reference potential. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11538664-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8475724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013189838-A1 |
| priorityDate | 2004-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.