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publicationNumber US-2005233159-A1
titleOfInvention Method of making a tantalum layer and apparatus using a tantalum layer
abstract A method of making tantalum structures, including, creating a tantalum layer disposed on a first layer region of a first layer and on a second layer region of a second layer. The tantalum layer has a substantially bcc-phase tantalum region on the first layer region, and a non-bcc-phase tantalum region on the second layer region.
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