http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005214460-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd4d66035ea1d0591bd83b9983877da4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate | 2003-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2ec9206df5aa20b2560b84227aa33a3 |
| publicationDate | 2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005214460-A1 |
| titleOfInvention | Method of depositing copper on a support |
| abstract | The invention relates to a process for the deposition of copper on a support. The process consists in bringing a copper precursor, in the vapor phase, into contact with the heated support, optionally in the presence of hydrogen. The copper precursor is in the form of a CuCl or CuBr composition in a nonaromatic, nonplanar and heteroatom-free liquid organic solvent which exhibits at least two nonconjugated unsaturations. |
| priorityDate | 2002-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.