http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005199487-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac9abfd1cb109175d1d7b8e1bbb8985f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
| filingDate | 2005-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05154192d5425c011240b99454ac86c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e288f11ff25a4a4b9cc86e105687152 |
| publicationDate | 2005-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005199487-A1 |
| titleOfInvention | Continuous ARC deposition apparatus and method with multiple available targets |
| abstract | An arc deposition apparatus comprises an evacuatable chamber and means for positioning at least two targets in the chamber, wherein a first one of the at least two targets is positionable in an operative position and another of the at least two targets is positionable in a standby position. An electrical power supply is provided for supplying electrical power to the target held in the operative position to form an arc on an emission surface of the operative target. Means are provided for preparing an emission surface of the target positioned in the standby position to have a predetermined morphology. Alternatively, or in conjunction with the surface preparing means, means are provided for inspecting whether the emission surface of the target positioned in the standby position has a predetermined morphology. Preferably, the positioning means is configured to interchange the at least two targets at a predetermined time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011109227-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2267181-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2267181-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2415897-A4 |
| priorityDate | 2004-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.