| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73d55b44219a84c850812a4488def924 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43e53136ef8304b11bee340c822e2721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e656a3d0ca4dae98ace8ab355072c42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a69f8f6ae0d2c3995c04eeef053f2ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dbded1adbc347ae4286cb643c80207f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c799067d43ee1089529a636c63f6a690
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e0b55a46bc446dfa49150b6204c5d6d |
| publicationDate |
2005-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005189652-A1 |
| titleOfInvention |
Method for fabricating a silicide film, multilayered intermediate structure and multilayered structure |
| abstract |
A silicon substrate is prepared, and a titanium intermediate layer is formed on the silicon substrate. Then, a compound element-containing layer containing compound elements to compose an intended silicide film is formed on the titanium intermediate layer, to form a multilayered intermediate structure, which is thermally treated to form the intended silicide film made of silicon elements of the silicon substrate and the compound elements of the compound element-containing layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7557040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009032884-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007202692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007166977-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7947560-B2 |
| priorityDate |
2004-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |