http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005189235-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate | 2005-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b485b1122ebae6fc9bdfb3856413ad14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aeaa1ad2c598813aa5c031ce6e6698f0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de408b2d1c6bb888952277756d3ca5dc |
| publicationDate | 2005-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005189235-A1 |
| titleOfInvention | Multi-phase polishing pad |
| abstract | An article of manufacture, a method, and an apparatus for use in a chemical mechanical polishing system is provided. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a polishing surface, the polishing surface including a first polishing portion having a first polishing material of a first hardness for polishing a first portion of the substrate, and a second polishing portion having a second polishing material of a second hardness for polishing a second portion of the substrate. The article of manufacturer may be disposed on a rotatable, stationary, or linear platen for processing a substrate. In another aspect, a method is provided for processing a substrate, including providing a platen containing the polishing article disposed on the rotatable platen, delivering a polishing composition to the polishing article, and contacting a substrate on the polishing article. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006178099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7261625-B2 |
| priorityDate | 2001-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.