| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2004-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63f8a8198530b9edac16ee637d53efa3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c539675d33ee971056cd81ce036a012e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1014106bf0a54471b61ba2486599037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8afefeb2b55574d515d70064ed82842 |
| publicationDate |
2005-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005176230-A1 |
| titleOfInvention |
Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices |
| abstract |
A method of making an electronic device in which a conductive electrode has been formed over a substrate including using a liquid to clean the conductive electrode, heating in a processing station the conductive electrode to a temperature which dries the conductive electrode and thereby removes residual cleaning liquid applied during the cleaning step, and providing an oxidizing plasma in the processing station to modify the properties of the conductive electrode. The method also includes producing a fluorocarbon plasma in the processing station to form a fluorocarbon layer over the modified conductive electrode, and further processing the structure to produce the electronic device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11638382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8056257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10967399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637853-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9299956-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009053088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009176108-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019334121-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8968837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013334511-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018005109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7307019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007158668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011068329-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7648922-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013129582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109415584-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8563339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007020951-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3478779-B1 |
| priorityDate |
2004-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |