http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005161827-A1

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filingDate 2005-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f4e877418d20654d7334f8e3dbfbd2
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publicationDate 2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005161827-A1
titleOfInvention Concentration graded carbon doped oxide
abstract A process for forming an interlayer dielectric layer is disclosed. The method comprises first forming a carbon-doped oxide (CDO) layer with a first concentration of carbon dopants therein. Next, the CDO layer is further formed with a second concentration of carbon dopants therein, wherein the first concentration is different than the second concentration.
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