| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00682 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate |
2004-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_176ddeba9adaad077976f32267d29410 |
| publicationDate |
2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005161432-A1 |
| titleOfInvention |
Pre-oxidization of deformable elements of microstructures |
| abstract |
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7129124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004041158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7517818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007041410-A1 |
| priorityDate |
2004-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |