| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
| filingDate |
2004-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5db87ccedbbd5210ef735a69b767cf50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85de35500c23de6fd58a05710304ff95 |
| publicationDate |
2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005158650-A1 |
| titleOfInvention |
One component EUV photoresist |
| abstract |
In one embodiment, a photoactive compound may be attached to a polymer backbone. This embodiment may be more resistant to the generation of reactive outgassing components and may exhibit better contrast. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9039910-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8962224-B2 |
| priorityDate |
2004-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |