http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005156098-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0028 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0024 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 |
| filingDate | 2005-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0106ae4503be4b921515eacbac1d60e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0a07f5ef6961102aaa9d284e07b4e4f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69bf60e2923c066d446f327b15a4f7c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a55f89b253f9cb019a1204b86f380cd4 |
| publicationDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005156098-A1 |
| titleOfInvention | Confocal wafer inspection method and apparatus |
| abstract | A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150137123-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016516307-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9696264-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014300890-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102079419-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021250771-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I603076-B |
| priorityDate | 1999-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.