| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-00 |
| filingDate |
2005-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fe86183e0c3c6839c5bcaa26d4e41a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3219cbdde3fc01306bad1fd1515ce4cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac021b40978a8626c3cb6ca07a18447f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bc548fd8b8bd05d0d8882ac4a15e65c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5de5264d184786b75f35d58402b35df4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac93d620409579c976bdd7f9504f1a6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79d61b387bca0529de5f09cfb3ef24e8 |
| publicationDate |
2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005155868-A1 |
| titleOfInvention |
Electrolytic processing apparatus and electrolytic processing method |
| abstract |
An electrolytic processing apparatus can increase the efficiency of the dissociation reaction of water and efficiently perform electrolytic processing, and can eliminate the need for an operation for a change of ion exchanger. The electrolytic processing apparatus includes: a processing electrode and a feeding electrode; a liquid supply section for supplying a liquid containing an ion-exchange material between the workpiece and at least one of the processing electrode and the feeding electrode; a power source for applying a voltage between the processing electrode and the feeding electrode; and a drive section for moving the workpiece and at least one of the processing electrode and the feeding electrode relative to each other; wherein electrolytic processing of the workpiece is carried out while keeping the workpiece not in contact with and close to the processing electrode at a distance of not more than 10 μm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108687344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018371636-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018290212-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10821521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110039140-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10487415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7527723-B2 |
| priorityDate |
2004-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |