| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2004-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf6c1aaa63807070ef7bcb4f918c5128 |
| publicationDate |
2005-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005153545-A1 |
| titleOfInvention |
Methods of forming copper interconnections using electrochemical plating processes |
| abstract |
Methods of forming a copper interconnect using an ECP process is disclosed. One disclosed method includes forming a barrier metal layer on the surface of a single or dual damascene structure; forming a silver layer as a seed layer on the surface of the barrier metal layer; forming a Cu layer on the silver layer by performing an ECP process using the silver layer as the seed layer; and performing an annealing process and a chemical mechanical polishing process for the Cu layer to form a Cu interconnect. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7452812-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103474394-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007238294-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009102051-A1 |
| priorityDate |
2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |