abstract |
A composition and method of preparation, to provide silane compounds that are free of chlorine. The compounds are hexakis(monohydrocarbylamino)disilanes with general formula (I) n n((R)HN) 3 —Si—Si—(NH(R)) 3 (I) n nwherein each R independently represents a C 1 to C 4 hydrocarbyl. These disilanes may be synthesized by reacting hexachlorodisilane in organic solvent with at least 6 -fold moles of the monohydrocarbylamine RNH 2 (wherein R is a C 1 to C 4 hydrocarbyl). Such compounds have excellent film-forming characteristics at low temperatures. These films, particularly in the case of silicon nitride and silicon oxynitride, also have excellent handling characteristics. |