| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2003-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a382c2f67f9c4b35bffc0ef204e61bb |
| publicationDate |
2005-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005103744-A1 |
| titleOfInvention |
Zeolite - sol gel nano-composite low k dielectric |
| abstract |
A method for forming a sol gel-zeolite composite dielectric material is herein described. Zeolite particles may be dispersed in a sol creating a liquid sol-zeolite colloid. The liquid sol-zeolite colloid may be deposited on an underlying layer. The liquid sol-zeolite colloid may be formed into a wet gel-zeolite composite. All of the liquid may be extracted from the wet gel-zeolite composite to form an aerogel-zeolite composite. Then the wet gel-zeolite composite or the aerogel-zeolite composite may be calcined to freeze the structure of the composite material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007173051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206456-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8287947-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7776682-B1 |
| priorityDate |
2003-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |