| abstract |
A method of patterning a low-k film is provided. In this method, a dielectric layer is spun over a substrate, and then an electron-beam exposure process is performed on the dielectric layer to define an exposed area and an unexposed area thereon. A developer is used to remove the unexposed area, wherein the developer can solve the unexposed area and enhance the porosity of the exposed area. Finally, a thermal process is performed on the exposed area. |