| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd221d21998567268ab28734915df324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
| filingDate |
2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f85a78dca6b8dd5ce0ae8ffc8572c8f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_655f336b181f2055dd3e5f2a2d64c148 |
| publicationDate |
2005-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005094160-A1 |
| titleOfInvention |
Two-dimensional spectroscopic system and film thickness measuring system |
| abstract |
Light horizontally output from a light source 50 passes through a projection lens 51 and reaches a half mirror 52 . The light reflected by the half mirror 52 coaxially reaches the measurement object 43 through a objective lens 53 . The light reflected by the objective lens 53 provides an image at a image-taking unit 56 through a telecentric optical system on an object side comprising the objective lens 53 and an aperture stop 54 . The light to be input to the image-taking unit 56 passes through a spectral filter provided in a multi-spectral filter 55 . Here, the light source 50 and the aperture stop 54 are in an image-forming relation and the object 43 and the image-taking unit 56 are in the image-forming relation. In addition, a numerical aperture on an image side in a light-projecting optical system is greater than a numerical aperture on an object side in a light-receiving optical system, and the light source 50 outputs light which has a certain degree of divergence and forms an image having uniform light intensity at the aperture stop 54. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013033698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2163870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8339617-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10602129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2451442-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8309905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010065725-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9739662-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016227197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I813366-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103674855-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10502621-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011032541-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2936099-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10469772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I769203-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2451442-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11243073-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018180476-A1 |
| priorityDate |
2003-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |