| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7bd26f2dbf037eb3aa1498013947d886 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F8-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F8-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-18 |
| filingDate |
2004-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77db78927a7d9a275d53be9dd622c492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7306508417a65d8ff428869a0438b9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0d25cd557209c70e073236ee3ab99ed |
| publicationDate |
2005-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005081715-A1 |
| titleOfInvention |
Air handling and chemical filtration system and method |
| abstract |
The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011136214-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103032172-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013081538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8523987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104833033-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8419844-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020047558-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009194311-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007294870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007295269-A1 |
| priorityDate |
2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |