http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005079687-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3310ea86f3c492f6c09d7be6592866d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-22 |
| filingDate | 2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72415cf1fd548fb26123f31073a9acb2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b0a484081de71db0f4b68cad3e3db18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec6e8aa510b8f9696600a0ec823008e9 |
| publicationDate | 2005-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005079687-A1 |
| titleOfInvention | Method for separating sapphire wafer into chips |
| abstract | Disclosed is a method for efficiently separating a sapphire wafer serving as a substrate, on which semiconductor elements are formed, into unit chips by scribing the sapphire wafer, after grinding and lapping a rear surface of the sapphire wafer and then sand-blasting the sapphire wafer. The method includes the steps of: (a) grinding a rear surface of the sapphire wafer so that the sapphire wafer has a designated thickness; (b) lapping the rear surface of the ground sapphire wafer so that the sapphire wafer has a designated thickness; (c) polishing the rear surface of the lapped sapphire wafer so that the sapphire wafer has a designated thickness; (d) sand-blasting the rear surface of the polished sapphire wafer by uniformly blasting particles at a designated pressure during a designated time onto the rear surface of the polished sapphire wafer; and (e) scribing the rear surface of the sand-blast ground sapphire wafer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765504-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012313249-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110238751-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008318362-A1 |
| priorityDate | 2003-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123279 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136121905 |
Total number of triples: 22.