http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005073203-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f679a7e16a87f7aedef8debde5276c19 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q11-0003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q1-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b0f1959631cf07e28f4d32dddd0422b |
| publicationDate | 2005-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005073203-A1 |
| titleOfInvention | Stage for a workpiece |
| abstract | A stage ( 10 ) for a workpiece comprises an upper member ( 13 ) for carrying a workpiece holder ( 15 ), a lower member ( 12 ) and two guide assemblies ( 16 ) mounting the upper member ( 13 ) on the lower member ( 12 ) to be rectilinearly displaceable relative thereto. The lower member ( 12 ) is in turn preferably similarly mounted on a fixed base plate ( 11 ) by further such guide assemblies ( 16 ), the two members ( 12, 13 ) being respectively displaceable in an X direction and a Y direction. At least one of the members ( 12 or 13 ), but preferably both members and also the base plate ( 11 ), is made of a machinable lightweight composite, for example aluminium alloy and silicon carbide, having a coefficient of thermal expansion not exceeding that of the principal material of the guide assemblies by more than substantially 50%, preferably by no more than 30 to 35%. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008121311-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7748420-B2 |
| priorityDate | 2003-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.