| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G27-00 |
| filingDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e2269d5b67906a383ee29bc4996e1c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58d664b77ab27b375de8b6828914f9bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3744ef161c7d2344da395a0332cc5e37 |
| publicationDate |
2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005065358-A1 |
| titleOfInvention |
Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same |
| abstract |
A hafnium-containing material is presented for forming a film having excellent vaporization stability and higher film formation rate. Also a method for producing the film is presented. The hafnium-containing material for film formation has a bond of a hafnium atom with a nitrogen atom, or a bond of a hafnium atom and an oxygen atoms. Zr content contained in the material is equal to or less than 650 ppm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011230671-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008299312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8334016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005202171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277780-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8680308-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7507848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536070-B2 |
| priorityDate |
2003-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |