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filingDate 2004-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005054203-A1
titleOfInvention Polishing composition
abstract The present invention relates to a polishing composition that can be preferably used to polish a silicon wafer. The polishing composition includes a block polyether represented by the chemical formula HO-(EO) a —(PO) b -(EO) c —H, wherein EO represents an oxyethylene group, PO represents an oxypropylene group, each of a and c represents the polymerization degree of ethylene oxide, b represents the polymerization degree of propylene oxide, and each of a, b, and c is an integer of 1 or greater; silicon dioxide; a basic compound; at least either one of hydroxyethyl cellulose and polyvinyl alcohol; and water.
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type http://data.epo.org/linked-data/def/patent/Publication

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