| abstract |
A fiber optic pressure sensor includes an optical fiber for transmitting light. The optical fiber has an axis. The fiber optic pressure sensor also includes an etched diaphragm perpendicular to the axis. The diaphragm includes an operative side located at a distance from the optical fiber sufficient to reflect a portion of the transmitted light into the optical fiber. The etched diaphragm includes a semiconductor, a dielectric, and/or a metal. |