| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-00 |
| filingDate |
2003-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5add030385e7d8fc24b626052d2eee4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed52792ee6ebea0048b938a02239e348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b6855d8955c14589152cbdccd6a8377 |
| publicationDate |
2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005029106-A1 |
| titleOfInvention |
Reduction of defects in conductive layers during electroplating |
| abstract |
The present invention is a method and system to reduce defects in conductive surfaces during electrochemical processes. The system includes a first power supply and a second power supply. The first powers supply is configured to supply a first power between a conductive surface of a workpiece and an electrode of the system. The second power supply is configured to supply a second power between the conductive surface and the electrode when a switching unit switches from the first power from the first power supply to the second power from the second power supply in response to the conductive surface contacting the process solution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11225727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010163408-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10214829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11674235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10968531-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10214828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007238265-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015218727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10689774-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9587322-B2 |
| priorityDate |
2003-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |