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filingDate 2004-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2005023270-A1
titleOfInvention Ceramic substrate and process for producing the same
abstract An object of the present invention is to provide a ceramic substrate that is superior in heat uniformity and thermal shock resistance, and has a large chuck power in the case that the ceramic substrate is made to be an electrostatic chuck. The ceramic substrate of the present invention is a ceramic substrate comprising a conductor layer formed therein, characterized in that a section of the edge of the conductor layer is in a peaked shape.
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